4 results
Response Surface Technique for Ex Situ Process Uniformity Optimization in a Multi-Zone RTP System
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 429 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 31
- Print publication:
- 1996
-
- Article
- Export citation
Monte Carlo Simulation of Optical Temperature Sensors in RTP Systems
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 387 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 143
- Print publication:
- 1995
-
- Article
- Export citation
Monte Carlo Simulation of Radiative Heat Transfer in Rapid Thermal Processing (RTP) Systems
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 425
- Print publication:
- 1994
-
- Article
- Export citation
Three Dimensional Temperature Uniformity Modeling of a Rapid Thermal Processing Chamber
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 303 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 211
- Print publication:
- 1993
-
- Article
- Export citation